The Key to Semiconductor Manufacturing Innovation : A New Paradigm in Ultra-Precision Robot Control
Wafer transfer is critical for yield optimization; however, conventional systems have faced significant barriers, such as complex initial setups, extended development cycles, and inefficient error recovery. In response to these industry demands, DAINCUBE introduces coreTM, an advanced platform optimized for semiconductor equipment control. Focusing on Wafer Transfer Robots (WTR) and Cassette Robotic Arms (CRA), coreTM dramatically improves process efficiency by integrating precision control, automated teaching, and intelligent error recovery.
Streamlining Development with Semiconductor-Specific Command Structures
The coreTM platform significantly reduces development complexity by providing high-level API command sets that reflect actual semiconductor robot logic. Instead of low-level coordinate control, engineers can rapidly implement sequences through intuitive, structured motion commands. Key commands such as Get, Put, Exchange, MAP, and AWC—combined with standardized parameters like Station, Slot, and Fork—ensure precise and consistent management of all robotic operations.
■ Revolutionizing Setup with Easy Teaching
The Easy Teaching Function simplifies complex setup processes, reducing teaching time and minimizing operator-induced variables.
- Start-End Teaching: Automatically interpolates positions for all slots by teaching only the first and last slots.
- Offset Teaching: Calculates precise positions at regular intervals automatically.
- Auto Mapping: Utilizes Touch Probe functionality to recognize slot positions, wafer presence, and anomalies.
■ AWC (Auto Wafer Centering) & Optimized Motion
The AWC function automatically corrects alignment errors between the robot and the wafer, securing process precision and boosting yield. Additionally, coreTM sets optimal motion profiles tailored to specific process characteristics, minimizing vibration and shortening cycle times.
Driving Operational Stability and Broad Versatility via Data Intelligence
■ Data-Driven Intelligent Error Recovery System
The intelligent control of coreTM leverages real-time data intelligence that records Slot, Station, and Fork information during robot operation. This enables fast, accurate error recovery based on operational history, minimizing downtime and ensuring stable, continuous performance.
■ Wide-Ranging Applications and Scalability
Leveraging this robust data-driven foundation, coreTM has become a proven platform extensively utilized across semiconductor and display manufacturing lines. Its versatility enables integrated control for a broad spectrum of equipment, including:
- WTR (Wafer Transfer Robot): Precision control for EFEM and vacuum environments.
- CRA (Cassette Robotics Arm): Specialized in wafer transfer and alignment.
- Probe Card Handler: Critical for high-precision testing processes.
- Display Handling Robot: Designed for managing large-scale glass panels.
DAINCUBE’s data intelligence records real-time information on slots, stations, and forks during operation. In the event of an error, the system performs accurate and rapid recovery based on this data, minimizing equipment downtime.
coreTM: Leading the Future of Semiconductor Robot Control
DAINCUBE’s coreTM is a comprehensive value-driven solution designed to meet the critical demands of semiconductor manufacturers: maximizing development efficiency, operational stability, and process throughput. In particular, its advanced features—including Automated Teaching, Auto Mapping, and Real-time Error Recovery—empower users to configure and maintain robotic operations with unprecedented ease.
By setting a new benchmark in robot control technology through coreTM, DAINCUBE is solidifying its position as a leading partner. We are committed to supporting our customers in securing a sustainable competitive advantage within increasingly sophisticated and demanding manufacturing environments.
